| Customization: | Available |
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| After-sales Service: | Free Installing and Traing, Technical Support |
| Warranty: | One-Year Warranty |
| Shipping Cost: | Contact the supplier about freight and estimated delivery time. |
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| Refund policy: | Claim a refund if your order doesn't ship, is missing, or arrives with product issues. |
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| Technical data | LY1011 | LY1612 | LY1912 |
| (Pumping speed (no load clean) |
5.0x10-3<10min | 5.0x10-3<10min | 5.0x10-3<10min |
| Ultimate vacuum (Pa) | 8.0x10-4 Pa | 8.0x10-4 Pa | 8.0x10-4 Pa |
| Heater power | 18/36KW | 36/54KW | 36/54KW |
| Total power (Kw) | 50/70KW | 50/75KW | 50/80KW |
| water cooling temperature | <25ºC | <25ºC | <25ºC |
| Water cooling flow | 20T/h | 20T/h | 20T/h |
| Number of MF targets | 2/4 pair | 2/4 pair | 2/4 pair |
| Number of multi-arc targets | 5/10 sets | 5/10 sets | 5/10 sets |
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